Skip to main content
SpringerLink
Log in

High density and low resistivity AZO:Si ceramic targets fabricated by slip casting and pressureless sintering using submicron powders

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

The aluminum-doped ZnO ceramic targets with 0.05 % silica doping (AZO:Si) were fabricated by slip casting and pressureless sintering using submicron ZnO and Al2O3 powders. The structure and properties of the AZO:Si targets were investigated at a temperature range of 1200–1450 °C. The structure, morphology, and electrical property of the AZO:Si targets were characterized by XRD, SEM and Hall effect. The results show that the silica can used as sintering aids to improve the density, and as donor to increase the conductivity of the AZO targets. The low sintering activity of submicron powders can be compensated by sintering aids and slip casting process. The AZO:Si targets exhibit higher density and conductivity than the pure AZO targets. Those targets fabricated by slip casting show homogeneous structure and large dimension.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

References

  1. M.A. Santana-Aranda, A. Armenta-Estrada, C. Mendoza-Barrera, C.R. Michel, A. Chavez-Chavez, S. Jimenez-Sandoval, M. Melendez-Lira, J. Mater. Sci. Mater. Electron. 18, 611 (2007)

    Article  Google Scholar 

  2. H.L. Hsu, C.B. Yang, C.H. Huang, C.Y. Hsu, J. Mater. Sci. Mater. Electron. 24, 13 (2013)

    Article  Google Scholar 

  3. M. de La L Olvera, A. Maldonado, R. Asomoza, M. Melendez-Lira, J. Mater. Sci. Mater. Electron. 11, 1 (2000)

    Article  Google Scholar 

  4. J.C. Chang, J.W. Guo, T.P. Hsieh, M.R. Yang, D.W. Chiou, H.T. Cheng, C.L. Yeh, C.C. Li, S.Y. Chu, Surf. Coat. Technol. 231, 573 (2013)

    Article  Google Scholar 

  5. S.J. Tark, M.G. Kang, S. Park, J.H. Jang, J.C. Lee, W.M. Kim, J.S. Lee, D. Kim, Curr. Appl. Phys. 9, 1318 (2009)

    Article  Google Scholar 

  6. B. He, J. Xu, H.Z. Xing, C.R. Wang, X.D. Zhang, Superlattices Microstruct. 64, 319 (2013)

    Article  Google Scholar 

  7. Z. Deng, C. Huang, J. Huang, M. Wang, H. He, H. Wang, Y. Cao, J. Mater. Sci. Mater. Electron. 21, 1030 (2010)

    Article  Google Scholar 

  8. Y.K. Moon, S.H. Kim, J.W. Park, J. Mater. Sci. Mater. Electron. 17, 973 (2006)

    Article  Google Scholar 

  9. M. Schlott, M. Kutzner, B.L. Gehman, N. Reger, F.J. Stadermann, Digest of Technical Papers of SID International Symposium, 1 (1996)

  10. T. Minami, J.I. Oda, J.I. Nomoto, T. Miyata, Thin Solid Films 519, 385 (2010)

    Article  Google Scholar 

  11. K. Nakashima, Y. Kumahara, Vacuum 66, 221 (2002)

    Article  Google Scholar 

  12. B.L. Gehman, S. Jonsson, T. Rudolph, M. Sherer, M. Weigert, R. Werner, Thin Solid Films 220, 333 (1992)

    Article  Google Scholar 

  13. S.H. Cho, Y.M. Kang, J.R. Lee, B.K. Ryu, P.K. Song, J. Korean Phys. Soc. 54, 1315 (2009)

    Article  Google Scholar 

  14. T. Omata, M. Kita, H. Okada, S. Otsuka-Yao-Matsuo, N. Ono, H. Ikawa, Thin Solid Films 503, 22 (2006)

    Article  Google Scholar 

  15. K. Utsumi, O. Matsunaga, T. Takahata, Thin Solid Films 334, 30 (1998)

    Article  Google Scholar 

  16. X. Wang, X. Bai, H. Duan, Z. Shi, J. Sun, S. Lu, S. Huang, Trans. Nonferrous Met. Soc. China 21, 1550 (2011)

    Article  Google Scholar 

  17. T. Long, D.G. Zhu, L.H. Wang, Electron. Compon. Mater. 23, 31 (2004)

    Article  Google Scholar 

  18. N. Neves, R. Barros, E. Antunes, J. Calado, E. Fortunato, R. Martins, I. Ferreira, J. Eur. Ceram. Soc. 32, 4381 (2012)

    Article  Google Scholar 

  19. Y.H. Sun, W.H. Xiong, C.H. Li, L. Yuan, J. Am. Ceram. Soc. 92, 2168 (2009)

    Article  Google Scholar 

  20. M.W. Wu, Ceram. Int. 38, 6229 (2012)

    Article  Google Scholar 

  21. H.S. Huang, H.C. Tung, C.H. Chiu, I.T. Hong, R.Z. Chen, J.T. Chang, H.K. Lin, Thin Solid Films 518, 6071 (2010)

    Article  Google Scholar 

  22. S. Tasaki, J. Tatami, H. Nakano, T. Wakihara, K. Komeya, T. Meguro, J. Ceram. Soc. Jpn. 118, 118 (2010)

    Article  Google Scholar 

  23. J.W. Xu, Z.P. Yang, H. Wang, X.W. Zhang, Bull. Mater. Sci. 37, 895 (2014)

    Article  Google Scholar 

  24. Y. Yang, P. Lan, M. Wang, T. Wei, R. Tan, W. Song, Nanoscale Res. Lett. 7, 481 (2012)

    Article  Google Scholar 

  25. J. Liu, W. Zhang, D. Song, Q. Ma, L. Zhang, H. Zhang, X. Ma, H. Song, Mater. Sci. Semicond. Proc. 27, 1 (2014)

    Article  Google Scholar 

  26. M. Powalla, B. Dimmler, Sol. Energy Mater. Sol. Cells 75, 27 (2003)

    Article  Google Scholar 

  27. R. Papitha, M. Buchi Suresh, Y.S. Rao, B.P. Saha, D. Das, R. Johnson, Process. Appl. Ceram. 7, 159 (2013)

    Article  Google Scholar 

  28. N. Rashidi, V.L. Kuznetsov, J.R. Dilworth, M. Pepper, P.J. Dobsonc, P.P. Edwards, J. Mater. Chem. C 1, 6960 (2013)

    Article  Google Scholar 

  29. F. Chouikh, Y. Beggah, M.S. Aida, J. Mater. Sci. Mater. Electron. 22, 499 (2011)

    Article  Google Scholar 

  30. G. Kim, J. Bang, Y. Kim, S.K. Rout, S.I. Woo, Appl. Phys. A 97, 821 (2009)

    Article  Google Scholar 

  31. Y.H. Chou, J.L.H. Chau, W.L. Wang, C.S. Chen, S.H. Wang, C.C. Yang, Bull. Mater. Sci. 34, 477 (2011)

    Article  Google Scholar 

  32. G. Tari, J.M.F. Ferreira, A.T. Fonseca, O. Lyckfeldt, J. Eur. Ceram. Soc. 18, 249 (1998)

    Article  Google Scholar 

  33. S.M. Olhero, J.M.F. Ferreira, Ceram. Int. 28, 377 (2002)

    Article  Google Scholar 

  34. W.S. Hong, L.C. Jonghe, X. Yang, M.N. Rahaman, J. Am. Ceram. Soc. 78, 3217 (1995)

    Article  Google Scholar 

  35. K. Shirouzu, T. Ohkusa, M. Hotta, N. Enomoto, J. Hojo, J. Ceram. Soc. Jpn. 115, 254 (2007)

    Article  Google Scholar 

Download references

Acknowledgments

This work is supported by the National Natural Science Foundation of China (21176051) and Guangxi Key Laboratory of Information Material (131024-Z).

Author information

Authors and Affiliations

  1. Key Laboratory for Macromolecular Science of Shaanxi Province, School of Materials Science and Engineering, Shaanxi Normal University, Xi’an, 710062, Shaanxi, People’s Republic of China

    Ji-wen Xu & Zu-pei Yang

  2. Guangxi Key Laboratory of Information Materials, Guilin University of Electronic Technology, Guilin, 541004, Guangxi, People’s Republic of China

    Ji-wen Xu, Hua Wang, Ling Yang & Changlai Yuan

Authors
  1. Ji-wen Xu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Zu-pei Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Hua Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Ling Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Changlai Yuan
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Ji-wen Xu.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Xu, Jw., Yang, Zp., Wang, H. et al. High density and low resistivity AZO:Si ceramic targets fabricated by slip casting and pressureless sintering using submicron powders. J Mater Sci: Mater Electron 26, 3819–3826 (2015). https://doi.org/10.1007/s10854-015-2908-4

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10854-015-2908-4

Keywords

Search

Navigation